TY  - BOOK
AU  - Madou, Marc J
TI  - Fundamentals Of Micro Fabrication: The Science Of Miniaturization
SN  - 849308267
U1  - 621.3815 2 
PY  - 2002///
CY  - New Delhi
PB  - Crc Press
KW  - Fundamentals Of Microfabrication
KW  - Mechanical Engineering
ER  -