TY  - BOOK
AU  - Adams, Thomas M
AU  - Laylon, Richard A
TI  - Introductory Mems Fabrication And Application
SN  - 9788132206637
U1  - 621.384 13 
PY  - 2010///
CY  - New York
PB  - Springer
KW  - Electronics & Communication
ER  -