TY  - BOOK
AU  - Hsu, Tai - Ran
TI  - Mems And Microsystems Design And Manufacture
T2  - Schaum's Outline Series
SN  - 007048709x
U1  - 621.381 
PY  - 2004///
CY  - New Delhi
PB  - Tata Mc Graw Hill
KW  - Electronics & Communication
KW  - Mems & Microsystems
ER  -