TY  - BOOK
AU  - Hsu, Tai - Ran
TI  - Mems And Microsystems Design And Manufacture: Design And Manufacture
SN  - 9780070487093
U1  - 623.043 
PY  - 2013///
CY  - New Delhi
PB  - Tata Mcgraw Hill
KW  - Electronics
ER  -