TY  - BOOK
AU  - Vaz, Filipe.-Fenker, Martin.-Martin, Nicolas.
TI  - Metallic Oxynitride Thin Films By Reactive Sputtering And Related Deposition Methods
SN  - 9781608051571
PY  - 2013///
PB  - Bentham Science Publishers
KW  - Technology & Engineering / General
ER  -