000 00370nam a2200133Ia 4500
008 221221s9999 xx 000 0 und d
020 _a9781608057825
041 _aENG
100 _aSuzuki, Kunihiro.
245 0 _aIon Implantation And Activation - Volume 1
260 _bBentham Science Publishers
_c2013
650 _aTechnology & Engineering / General
942 _cEB
999 _c18784
_d18784