000 00490nam a2200181Ia 4500
008 221221s9999 xx 000 0 und d
020 _a824726375
041 _aENG
082 _a629.135
_bOSI/M
100 _aOsiander, Robert
245 0 _aMems And Microstructures In Aerospace Applications
260 _aNew Delhi
_bCrc Press
_c2006
300 _a388
650 _aElectronics & Communication
650 _aMems
700 _aDarrin, M Ann Garrison; Champion, John L
942 _cBK
999 _c21948
_d21948