000 00469nam a2200169Ia 4500
008 221221s9999 xx 000 0 und d
020 _a007048709x
041 _aENG
082 _a621.381
_bHSU/M
100 _aHsu, Tai - Ran
245 0 _aMems And Microsystems Design And Manufacture
260 _aNew Delhi
_bTata Mc Graw Hill
_c2004
490 _aSchaum's Outline Series
650 _aElectronics & Communication
650 _aMems & Microsystems
942 _cBK
999 _c21949
_d21949