000 00431nam a2200169Ia 4500
008 221221s9999 xx 000 0 und d
020 _a8181282027
041 _aENG
082 _a620.5
_bFUJ/M
100 _aFujita, H
245 0 _aMicro Machines As Tools For Nanotechnology
260 _aNew Delhi
_bSpringer
_c2004
300 _a211
650 _aMechanical Engineering
650 _aNanotechnology; Mechanics
942 _cBK
999 _c22103
_d22103