000 00399nam a2200145Ia 4500
008 221221s9999 xx 000 0 und d
041 _aENG
082 _a621.3
_bSED/P
100 _aSedky, Sherif
245 0 _aPost Processing Techniques For Integrated Mems
260 _aNew Delhi
_bArtech House
_c2006
300 _a207
650 _aPost-Processing Techniques For Integrated Mems
942 _cREF
999 _c25680
_d25680