| 000 | 00352nam a2200133Ia 4500 | ||
|---|---|---|---|
| 008 | 221221s9999 xx 000 0 und d | ||
| 082 |
_a621.381 5 _bCAM/S |
||
| 100 | _aCampbell, Stephen A | ||
| 245 | 0 | _aScience And Engineering Of Microelectronic Fabrication | |
| 250 | _a2 | ||
| 260 | _bOxford | ||
| 650 | _aElectronics & Communication | ||
| 942 | _cBK | ||
| 999 |
_c29225 _d29225 |
||