000 00354nam a2200133Ia 4500
008 221221s9999 xx 000 0 und d
020 _a9780521822817
041 _aENG
100 _aFreund, L. B.-Suresh, S.
245 0 _aThin Film Materials
260 _bCambridge University Press
_c2003
650 _aTechnology & Engineering / General
942 _cEB
999 _c33113
_d33113