000			00386nam a2200157Ia 4500
008			221221s9999 xx 000 0 und d
020			_a9814126942
041			_aENG
082			_a621.395 _bGHA/V
100			_aGhandhi, Sorab K
245		0	_aVlsi Fabrication Principles
260			_aNew Delhi _bWiley & Sons _c2003
650			_aCivil Engineering
650			_aV L S I
942			_cBK
999			_c34273 _d34273